Electromigration Evaluation System (AEM-2000)

Overview of Equipment:

Electromigration evaluation at 400°C

The operating life of semiconductor devices relies on microfabrication and new materials, and therefore, electromigration evaluation under more rigorous life acceleration conditions is important.

This system is equipped with analytical software to obtain the parameters necessary for determining the device life from accurate measurements of the life acceleration factors of temperature and current stress.

The AEM-2000 Electromigration Evaluation System features improved operability, reliability, and ease of data analysis for various applications from tip evaluation to production control, and it accurately meets customers’ needs for evaluation.

Main specifications
Stress current source Setting ranges +DC0.1mA to 200mA
Following voltage 35V
Extrusion test voltage Setting ranges -10.0 V to -1.0 V and 1.0 V to 20.0 V
Accuracy ±(2% of setting value+20 mV)
Oven Temperature control range +65 to +400°C
Temperature fluctuation width ±0.5°C (+65 to 350°C)
Temperature uniformity ±2.5°C (+65 to +350°C)
Accessories Nitrogen gas connecting port
System variation
Model AEM-240C3
AAA
AEM-160C2
0AA
AEM-080C1
00A
EM module output current Oven 1 200mA 200mA 200mA
Oven 2 200mA 200mA
Oven 3 200mA /
Number of evaluation channels 240ch 160ch 80ch
DUT board Number of boards 24 (8× 3 ovens) 16 (8× 2 ovens) 8
IC sockets 5 sockets/board (both DIP 28-pin 600 mil and 300 mil)
Control cabinet dimensions (mm) W580×D1220×H1945 W580×D1220×H1490
Structure Structure Structure Structure

 

Features:

240-channel evaluation testing in 1 cabinetEach DUT board has 5 sockets, and each oven can accommodate 8 DUT boards. Each socket can accommodate up to 2 DUTs to enable testing of 2 samples. Perform evaluation testing of up to 80 DUTs in 1 oven.

Photo: 240-channel type
240-channel type
High-precision oven with a high temperature of 400°C
The oven can reach a testing temperature of 400°C, and it features outstanding precision with a distribution of ±2.5°C at 350°C. Mount up to 3 ovens in each cabinet to enable evaluation under different temperature conditions for each oven.
Wide current stress application up to 200 mA
Apply a stress current from 0.1 mA to 200 mA.
The socket accepts both 28-pin 600-mil and 300-mil.
Newly developed highly reliable board
The double contact configuration (patent pending) enables the connectors between the DUT board and sockets to be firmly fixed, and the unique ESPEC design ensures a solid connection of the DUTs and sockets.
The new configuration enables long-term evaluation under high temperatures and ensures high reliability.

Photo: Newly developed highly reliable board

Pin assignment scramble function
The pin assignment scramble function of the ESPEC DUT board enables evaluation even for DUTs with different pin assignments.

Photo: Pin assignment scramble function

Monitor Screen:

The monitor screen lets you check the test progress status, resistance value, and rate of change for all DUTs in real-time at a single glance.
Use the test condition setting screen to enter and check all items on a single screen.

Photo: Monitor screen
Monitor screen

 

Analytical Software:

software

 

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